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In this article, we give an overview about the chemical and physical processes that play a role in etching at lower wafer temperatures. Conventionally, plasma etching processes rely on the formation of radicals, which readily chemisorb at the surface. Molecules adsorb via physisorption at low temperatures, but they lack enough energy to overcome the energy barrier for a chemical reaction. The density of radicals in a typical plasma used in semiconductor manufacturing is one to two orders of magnitude lower than the concentration of the neutrals. Physisorption of neutrals at low temperatures, therefore, increases the neutral concentration on the surface meaningfully and contributes to etching if they are chemically activated. The transport of neutrals in high aspect ratio features is enhanced at low temperatures because physisorbed species are mobile. The temperature window of low temperature etching is bracketed at the low end by condensation including capillary effects and diminished physisorption at the high end. The useful temperature window is chemistry dependent. Besides illuminating the fundamental effects, which make low temperature processing unique, this article illustrates its utility for semiconductor etching applications. 

The goal of the search for extraterrestrial intelligence (SETI) is the detection of nonhuman technosignatures, such as technology-produced emission in radio observations. While many have speculated about the character of such technosignatures, radio SETI fundamentally involves searching for signals that not only have never been detected, but also have a vast range of potential morphologies. Given that we have not yet detected a radio SETI signal, we must make assumptions about their form to develop search algorithms. The lack of positive detections also makes it difficult to test these algorithms’ inherent efficacy. To address these challenges, we present setigen, a Python-based, open-source library for heuristic-based signal synthesis and injection for both spectrograms (dynamic spectra) and raw voltage data. setigen facilitates the production of synthetic radio observations, interfaces with standard data products used extensively by the Breakthrough Listen project, and focuses on providing a physically motivated synthesis framework compatible with real observational data and associated search methods. We discuss the core routines of setigen and present existing and future use cases in the development and evaluation of SETI search algorithms.